UV LED Curing System for 8″ wafers
UVET company’s UV LED curing system UVSS-288C3 are built to cure wafers up to Φ200mm size, providing 365nm wavelength and 750mW/cm^2 UV intensity. It can make the UV-sensitive tape curing and hardening to reduce its adhesive strength in seconds.
Compared to conventional mercury-arc lamps, it utilizes high-capability LEDs. It enables to process a variety of materials at maximum production speeds and homogeneous illumination, with low-input power requirements.
|Heat dissipation||Fan cooling|